On-Chip Pseudorandom MEMS Testing

This paper presents a Built-In-Self-Test (BIST) implementation of pseudo-random testing for MEMS. The technique is based on Impulse Response (IR) evaluation using pseudo-random Maximum–Length Sequences (MLS). We will demonstrate the use of this technique for an on-chip fast and accurate broadband determination of MEMS behaviour, in particular for the characterisation of MEMS structures such as cantilevers and bridges, determining their mechanical and thermal behaviour using just electrical tests.